| 摘要 |
PURPOSE: A loading apparatus for wafers is provided to prevent damages of a boat and wafers by preparing a collis ion preventing piece able to prevent the collis ion of a holder moving forward to the wafers loaded on a boat. CONSTITUTION: When a front face of a holder(430) collides with a wafer(10a) loaded on a boat(20) due to a wrong selection of a right position or the occurrence of a disorder in a wafer loading apparatus, and the holder moves in the direction of B1, the lower end of a jig(452) contacts to the wafer at first. Accordingly, the jig pressing a limit switch(451) turns a certain angular degrees in the direction of C by centering on a protrusion(453) by restoring the elasticity of a spring(454). Thereby the button of the limit switch is protruded forwardly, and then the limit switch is turned off. The forward movement of the holder is stopped by cutting off power supply according to the off-state of the limit switch. Thereby, the problems of the breakage due to the falling over of the boat due to the collis ion of the holder or the damage of the wafer loaded on the boat are solved.
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