Verfahren und Vorrichtung zum Bearbeiten von Werkstücken mit Hochenergiestrahlung

摘要

A method for machining workpieces (20), using high-energy radiation, especially a laser beam (1), whereby said beam is focused onto a machining point (40) by means of a machining lens system, the luminous radiation from the workpiece is picked up by the machining lens system and evaluated using a detector (11) that is part of a process monitoring device. In a machining area of said workpiece (20), an optical measurement is carried out on the surface of the workpiece with an external light source (32-34), using the measured light that is reflected from the machining area. The inventive method is characterized in that the beam of light used to monitor the process and the reflecting measured light are detected using the same machining lens system.