VACUUM PROCESSING SYSTEM

摘要

A vacuum processing system characterized by comprising a load port in which an object to be processed is set; a common conveyance chamber disposed adjacent the load port and having an internal space set to atmospheric pressure, and a first movable conveyor disposed in the internal space and capable of carrying the object into and out of the load port; a processing unit having one processing chamber for applying a predetermined treatment to the object, and a vacuum conveyance chamber having an internal space connected to the processing chamber and set to atmospheric pressure, and having a second movable conveyor disposed in the internal space for carrying the object into and out of the processing chamber, the common conveyance chamber having a plurality of processing units connected individually and mutually substantially parallelly, the processing units having their vacuum conveyance chambers connected to the common conveyance chamber and linearly extending substantially orthogonally to the common conveyance chamber, the object to be processed being carried into and out of the vacuum conveyance chamber through the first conveyor.