APPARATUS FOR INJECTING ION TO PRODUCE SEMICONDUCTOR DEVICE

摘要

PURPOSE: An apparatus for injecting ion is provided to fix a cylinder to a gate valve firmly by using an additional fixing member for preventing the cylinder from being broken and for completely opening and closing the gate valve. CONSTITUTION: An apparatus for injecting ion contains a first fixing member(130) for fixing a cylinder(100) to a gate valve(120) and a second fixing member(140) for fixing the cylinder to a guide block(110). Herein, a C-ring is used for the first fixing member, and a screw is used for the second fixing member. Therefore, the cylinder is fixed to the gate valve doubly for completely opening and closing the gate valve to inject the ion stably.