| 摘要 |
PURPOSE: A transfer device is provided to prevent the upper part of a carrier shelf loading many wafers from shaking on transferring. CONSTITUTION: A shake preventer is installed in the upper part of a carrier shelf(30) in order to prevent the carrier shelf from shaking and consists of a shaft(51), a guide member(52) and a connecting member(53). When moving the carrier shelf by a transfer device, the carrier shelf moves without shaking, as the guide member and the connecting member sliding along the shaft supports the shelf. Also, a wafer loaded on the carrier is prevented from twisting.
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