PARYLENE MICRO CHECK VALVE AND FABRICATION METHOD THEREOF

摘要

The present disclosure describes a Parylene micro check valve (10) including a micromachined silicon valve seat (15) with a roughened top surface to which a membrane cap (20) is anchored by twist-up tethers (25). The micro check valve is found to exhibit low cracking pressure, high reverse pressure, low reverse flow leakage, and negligible membrane-induced flow resistance when used as a valve over a micro orifice through which flow liquid and gas fluids.