| 摘要 |
A bath system having a container (20) with vertical upper sidewalls (23), a bottom (25) and oblique walls (24). Each oblique wall (24) joins the bottom (25) to a sidewall (23), with ends (28) joining the sidewalls (23), bottom (25) and oblique walls (24) to form an open enclosure for the container (20). An inlet (14) is mounted to the bottom (25) so that fresh processing liquid passes in a laminar flow over the surfaces of semiconductors wafers (10) held in the container (20). High power sonic transducers (30) are mounted to the oblique walls (24) to deliver unimpeded sonic energy to the surfaces of the wafers (10). In operation, the sonic transducers (30) on each oblique wall (24) are multiplexed so that deleterious interference between sonic waves from the two oblique walls (24) is avoided.
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