| 摘要 |
To provide a cleaning apparatus capable of easily and positively washing off attachments from a dresser (6) for dressing a lap in a plane polishing apparatus. An air nozzle (15) for bubbling, a first bottom surface brush (18) that comes in slidable contact with a dressing member (9), and second bottom surface brushes (22a and 22b) that come in slidable contact with a portion (6a) other than the dressing member (9) are provided in a cleaning tank (11) for accommodating the dresser (6), which is provided with the dressing member (9) on its bottom surface, in a state where the dresser (6) is immersed in a cleaning solution. Furthermore, a side surface brush (25) that comes in contact with an outer side surface of the dresser (6) is provided. <IMAGE> |
