Carbon material, method for manufacturing the same material, field-emission type cold cathode using the same material and method for manufacturing the same cathode

摘要

A field-emission type cold cathode using a carbon material as its emitter, has a plurality of acicular carbon film protrusions on its substrate electrode (1), thus having large current properties. Also, by performing ECR plasma processing, in an atmosphere of hydrogen, on a carbon film (2) formed on the substrate electrode (1), such a field-emission type cold cathode can be easily formed that has acicular emitters made of carbon arranged close to each other.