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经营范围
发明名称
High density plasmas
摘要
申请公布号
GB2343992(A)
申请公布日期
2000.05.24
申请号
GB19980025324
申请日期
1998.11.20
申请人
MICHAEL JOHN * THWAITES
发明人
MICHAEL JOHN * THWAITES
分类号
H01J37/32;(IPC1-7):H01J37/32;C23C14/34;C23C14/35;H01J37/34;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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