摘要 |
<p>A stage system includes a first stage movable along a reference plane, containing a vertical direction, and in the vertical direction or in a first direction close to the vertical direction, a second stage movable in a second direction intersecting with the first direction and relative to the first stage, a first driving mechanism for moving the first stage in the first direction, a second driving mechanism for moving the second stage in the second direction, a countermass movable in the first direction, and a third driving mechanism for moving the countermass in a direction opposite to the first direction. <IMAGE></p> |