| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for stably driving an ink jet head by enlarging a margin of a driving voltage. SOLUTION: A discrete electrode 22 is provided an opposition to a diaphragm with a gap therebetween. A voltage is applied to the discrete electrode 22 and the diaphragm is deformed, then an ink drop is ejected from a nozzle. The discrete electrode 22 which is opposite to the diaphragm and consists of a first diffusion layer 22a including an n-type or a p-type conductive impurity atom is formed on a monocrystal Si substrate 21. The voltage is applied to the discrete electrode 22 and the diaphragm is deformed by virtue of an electrostatic force, thereby ejecting the ink drop from the nozzle. The discrete electrode 22 formed on the Si substrate 21 consists of the n-type or p-type conductive first diffusion layer 22a and a second diffusion layer 22b which is contacted with the circumference of the first diffusion layer and has the same conductive property as the first diffusion layer and an impurity concentration less than at least that of the first diffusion layer 22a.
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