| 摘要 |
PROBLEM TO BE SOLVED: To form a silicon thin film diaphragm which can be used in an electrostatically driven high-density ink-jet head. SOLUTION: A diaphragm 12 is set to a part of a liquid chamber 13 having a nozzle 21 formed for discharging ink liquid drops. An electrode 31 is provided at a position outside the liquid chamber confronting the diaphragm 12. The diaphragm 12 is driven by impressing a voltage between the electrode 31 and diaphragm 12, whereby ink is discharged from the nozzle 21. The liquid chamber 13 is constituted of a single crystal silicon 10 and the diaphragm 12 is constituted of a polycrystal silicon thin film, with an oxidation film 16 formed therebetween. The ink-jet head has the diaphragm 12 formed of the polycrystal silicon thin film with the oxidation film between the diaphragm and liquid chamber. Since the diaphragm 12 is formed of polycrystal silicon, the thin film diaphragm is large in area and uniform in thickness, so that an ink discharge characteristic is varied a little for every nozzle or head.
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