| 摘要 |
PROBLEM TO BE SOLVED: To enable the inhibition of a clogging in the filter due to a solid component contained in an exhaust gas from a semiconductor manufacturing device by sequentially arranging a filter part made of Teflon and a gas discharge part above a gas introduction part in which a scraper with plural blades mounted radially is fitted in a freely rotatable way. SOLUTION: The exhaust gas side of a dry pump is connected to the gas introduction aperture 11 of a gas introduction part 10 and, at the same time, a storage tank 60 is connected to a solid discharge aperture 13 formed at the bottom face with the center funneled downward, through a valve 14. In addition, a scraper 12 having four blades arranged at an almost 90 deg. interval is housed in the gas introduction part 10. Further, the scraper 12 is attached, in a freely detachable manner, to the tip of a rotary shaft 40 passing through the center of a filter 21 obtained by sewing a Teflon yarn-woven fabric in a cylindrical shape, of a filter part 20. Finally, the upper end part of the rotary shaft 40 is connected to the rotary shaft 40 of a motor 50 arranged above a gas discharge part 20 through a rotating seal 41 and thus the gas treatment is performed while the scraper 12 is rotated.
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