| 摘要 |
PROBLEM TO BE SOLVED: To disperse an arrangement variation of a pitch length in the more irregular and ununiform direction in a limited kind of pitch elements and to more effectively reduce a pattern noise. SOLUTION: Many kinds of pitch elements 6 having different length are circumferentially pitch-arranged. The pitch arrangement has a continuous arranging portion 10 in which the same kind of pitch elements 6 are continuously arranged. A maximum continuous number CM that a continuous number I of the pitch elements 6 becomes maximum satisfies 2<CM<0.35×NN/PK when the kind number of the pitch elements 6 is defined as PK and a total number of the pitch elements 6 is defined as NN. |
