发明名称 |
Semiconductor physical quantity sensor with stopper portion |
摘要 |
A mass portion of a movable portion is supported by an anchor portion protruding from a substrate through a beam portion. A stopper portion fixed to the substrate through another anchor portion is disposed on a side opposite to the mass portion with respect to the beam portion to define a gap with the beam portion. The stopper portion is electrically connected to the beam portion through the anchor portions. Accordingly, the movable portion is restricted from being displaced in a direction generally parallel to a surface of the substrate, and a movable electrode of the movable portion is prevented from being attached to the fixed electrode.
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申请公布号 |
US6065341(A) |
申请公布日期 |
2000.05.23 |
申请号 |
US19980209414 |
申请日期 |
1998.12.11 |
申请人 |
DENSO CORPORATION |
发明人 |
ISHIO, SEIICHIRO;SAKAI, MINEKAZU;AO, KENICHI |
分类号 |
G01P15/08;G01P15/125;(IPC1-7):G01P15/125 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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