发明名称 |
BASE BOARD CONVEYING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To improve workability by shortening the falling/rising time of a device and roller replacing/adjusting time and suppress the aged dislocation of rollers caused by use and a short life of a built-in bearing. SOLUTION: This conveying device moving in a vacuum container or between the vacuum container and a device in the atmosphere adjacent to the vacuum container is provided with a truck 11 of inverted recessed cross-sectional shape; first support rollers 12a arranged inside the truck 11 to hold the lateral direction to the proceeding direction of the truck 11; second support rollers arranged inside the truck 11 to support the load of the truck 11; and a guide rail 17 for guiding the traveling position of the truck 11. |
申请公布号 |
JP2000142389(A) |
申请公布日期 |
2000.05.23 |
申请号 |
JP19980326671 |
申请日期 |
1998.11.17 |
申请人 |
MITSUBISHI HEAVY IND LTD |
发明人 |
SASAGAWA EISHIRO;KANZAKI JUNICHI;UENO MOICHI |
分类号 |
B61B13/06;C23C14/50;C23C16/44;H01L21/677;H01L21/68;(IPC1-7):B61B13/06 |
主分类号 |
B61B13/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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