TEMPERATURE MEASURING SYSTEM OF SINGLE CRYSTAL ROD IN PULLING UP APPARATUS

摘要

PROBLEM TO BE SOLVED: To efficiently produce a single crystal rod hardly scattering the quality in good reproducibility by monitoring temperature distribution in the vicinity of solid-liquid interface of the single crystal rod and controlling the variation in the temperature distribution. SOLUTION: A melt 12 of a material which becomes a single crystal rod 15 is stored in a crucible 13 disposed in a chamber 11 of a pulling up apparatus 10 and the melt 12 is heated by a heater 17 surrounding the outer peripheral surface of the crucible 13 and further, the single crystal rod 15 is pulled up from the melt 15. A rod 23 having high radiation ratio is disposed parallel to pulling up shaft of the single crystal rod 15 and the lower end of the rod 23 is brought into contact with the melt 12. Further, the temperature distribution in the longitudinal direction is detected by a non-contact type temperature sensor 24 set outside the chamber 11.