发明名称 Non-linear circuit elements on integrated circuits
摘要 An electrical interconnection structure on an integrated circuit is provided that has a) a substrate layer; b) a diffusion barrier on the substrate layer; c) a copper layer on the diffusion barrier; and d) a copper oxide layer on the copper layer. Methods of making such an interconnection structure is also provided. Such an interconnection structure may be used as a rectifier to prevent damage of sensitive devices from voltage spikes.
申请公布号 US6066560(A) 申请公布日期 2000.05.23
申请号 US19980072705 申请日期 1998.05.05
申请人 LSI LOGIC CORPORATION 发明人 YAKURA, JAMES P.
分类号 H01L21/768;H01L23/532;(IPC1-7):H01L21/476 主分类号 H01L21/768
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