发明名称 Control apparatus and control method
摘要 <p>A control apparatus comprises a plurality of process units (11, 12, 13, 14, 15, 16) operating in accordance with parameters, a storing section (21) for storing parameters relevant to processings by the process units, a touch screen (19) for setting predetermined parameters for the process units, and a parameter administration section (18, 20). The parameter administration section sends corresponding one of the stored parameters to one of the process units in reply to a request issued thereby, transfers the set parameter to the process unit, and rewrites the parameters stored in the storing section to the parameters set by the setting section. <IMAGE></p>
申请公布号 SG72810(A1) 申请公布日期 2000.05.23
申请号 SG19980001002 申请日期 1998.05.04
申请人 TOKYO ELECTRON LIMITED 发明人 ASANO KAZUYUKI
分类号 H01L21/677;G05B19/418;H01L21/02;(IPC1-7):H01L21/68 主分类号 H01L21/677
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