Device and method for detecting leakage of filter film

摘要

PCT No. PCT/JP97/04828 Sec. 371 Date Jun. 24, 1999 Sec. 102(e) Date Jun. 24, 1999 PCT Filed Dec. 25, 1997 PCT Pub. No. WO98/29184 PCT Pub. Date Jul. 9, 1998An apparatus for detecting leakage through a filtration membrane which comprises a gas-supplying source for supplying a gas to one of two spaces formed by partition with the filtration membrane, a gas-detecting device for measuring the degree of leakage of the gas into the other space, and further preventing the undesirable influence of the supplied gas on the gas-detecting device.