,申请号JP19900237663-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JP3043383(B2)	申请公布日期	2000.05.22
申请号	JP19900237663	申请日期	1990.09.07
申请人		发明人
分类号	G03F7/16;B05B1/14;B05B15/04;B05C5/00;B05C11/08;H01L21/027;(IPC1-7):B05C5/00	主分类号	G03F7/16
代理机构		代理人
主权项
地址

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