发明名称 OPTICAL CANTILEVER AND PRODUCTION METHOD THEREFOR
摘要 <p>An optical cantilever for SNOM which emits and/or detects light through a fine aperture, is excellent in mass-productivity and uniformity and permits a fast observation without damaging even a soft sample, characterized by comprising a base (1), a cantilever (2) extending from the base (1), an optical propagation unit (5) and an optical propagation tip (3) of a dielectric penetrating the cantilever (2) and formed so as to protrude beyond the side opposite to the base of the cantilever with its tip end sharpened, a light shielding film (6) covering around the tip-sharpened dielectric, and a fine aperture (4) formed at the tip end of the dielectric.</p>
申请公布号 WO0028299(A1) 申请公布日期 2000.05.18
申请号 WO1999JP06121 申请日期 1999.11.02
申请人 SEIKO INSTRUMENTS INC.;NIWA, TAKASHI;ICHIHARA, SUSUMU;MITSUOKA, YASUYUKI;KATO, KENJI;CHIBA, NORIO;OUMI, MANABU;KASAMA, NOBUYUKI 发明人 NIWA, TAKASHI;ICHIHARA, SUSUMU;MITSUOKA, YASUYUKI;KATO, KENJI;CHIBA, NORIO;OUMI, MANABU;KASAMA, NOBUYUKI
分类号 G01B21/30;G01N37/00;G01Q20/02;G01Q60/18;G01Q60/22;G01Q60/38;G01Q70/16;(IPC1-7):G01N13/14;G01N13/16;G12B21/06;G12B21/08 主分类号 G01B21/30
代理机构 代理人
主权项
地址