发明名称 |
CAPACITIVE VACUUM SENSOR |
摘要 |
A capacitive vacuum sensing system with only two capacitive sensing elements, an inner, disk-shaped element, and an outer annular ring shaped element. The diaphragm is grounded by being placed in contact with a machined metal ring that controls the spacing between the capacitive sensing elements and the diaphragm, and forms an effective seal with the diaphragm.
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申请公布号 |
WO0028295(A1) |
申请公布日期 |
2000.05.18 |
申请号 |
WO1999US25556 |
申请日期 |
1999.10.29 |
申请人 |
BAUSCH & LOMB SURGICAL, INC. |
发明人 |
KEPLEY, KEVIN, P.;PERKINS, JAMES, P. |
分类号 |
G01L9/00;(IPC1-7):G01L9/00 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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