| 摘要 |
A mesopump having a plurality of elementary cells, a process for making the same, and a method of pumping fluids using the mesopump. The cells each have a body forming a cavity having upper and lower electrodes with curved surfaces facing the other electrode. Electrical connections selectively energize the electrodes. A bistable diaphragm is mounted with its major portion located i n the cavity between the electrodes so that the diaphragm deflects toward the upper or lower surfaces to conform thereto. A lateral conduit is located at at least one end of the body for fluid communication with the cavity. The later al conduits are operably connected to a portion of the diaphragm mounted in the body and are opened and closed by movement of the diaphragm. A vertical conduit on at least one curved surface controls flow of fluid by movement of the diaphragm into and out of contact with the vertical conduit. The cells a re interconnected to form the mesopump whereby activation of the electrodes causes movement of the diaphragm between the electrodes to move fluid into a nd out of the body. The preferred mesopump includes sets of three cell groups s o that fluid enters a first cell from a source of fluid, is expelled to a seco nd cell through a vertical conduit; expelled via a lateral conduit to a third cell, and expelled therefrom, whereby fluid passes from cell to cell upon activation of the electrodes.
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