Bildprojektionsverfahren und Herstellungsverfahren von Halbleiterbauteilen unter Verwendung desselben,申请号DE19926030443T-传众专利搜索

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发明名称	Bildprojektionsverfahren und Herstellungsverfahren von Halbleiterbauteilen unter Verwendung desselben
摘要
申请公布号	DE69230443(T2)	申请公布日期	2000.05.18
申请号	DE19926030443T	申请日期	1992.07.31
申请人	CANON K.K., TOKIO/TOKYO	发明人	HAYATA, SHIGERU
分类号	G02B27/42;G02B27/46;G02B27/52;G03F7/20;H01L21/027;(IPC1-7):G02B5/32	主分类号	G02B27/42
代理机构		代理人
主权项
地址

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