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经营范围
发明名称
Magnetron Zerstäubungssystem
摘要
申请公布号
DE69605840(T2)
申请公布日期
2000.05.18
申请号
DE19966005840T
申请日期
1996.04.04
申请人
ODME INTERNATIONAL B.V., VELDHOVEN
发明人
LANDSBERGEN, JEROEN FRANCISCUS MARIA;VISSER, JAN
分类号
C23C14/34;C23C14/35;G11B7/26;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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