A method for assessing a surface finish on a substrate (figure 1). The method applies molecules that have an interaction with the substrate to the substrate. The surface is then illuminated and the molecules monitored to determine the finish of the substrate (figure 2).
申请公布号
WO0028306(A1)
申请公布日期
2000.05.18
申请号
WO1999US26472
申请日期
1999.11.10
申请人
UNIVERSITY OF DELAWARE;WIRTH, MARY, J.;CUPPERT, COZETTE;DONESKI, LEON