发明名称 PROBING OF SURFACE ROUGHNESS
摘要 A method for assessing a surface finish on a substrate (figure 1). The method applies molecules that have an interaction with the substrate to the substrate. The surface is then illuminated and the molecules monitored to determine the finish of the substrate (figure 2).
申请公布号 WO0028306(A1) 申请公布日期 2000.05.18
申请号 WO1999US26472 申请日期 1999.11.10
申请人 UNIVERSITY OF DELAWARE;WIRTH, MARY, J.;CUPPERT, COZETTE;DONESKI, LEON 发明人 WIRTH, MARY, J.;CUPPERT, COZETTE;DONESKI, LEON
分类号 G01N21/55;G01N31/00;(IPC1-7):G01N21/55 主分类号 G01N21/55
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