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发明名称
Electrostatic chucks
摘要
申请公布号
AU719669(B2)
申请公布日期
2000.05.18
申请号
AU19970024314
申请日期
1997.04.09
申请人
DELSYS PHARMACEUTICAL CORPORATION
发明人
HOI CHEONG STEVE SUN;TIMOTHY ALLEN PLETCHER
分类号
A61K9/20;A61K9/28;B05B5/08;H02N13/00;(IPC1-7):H02N13/00;B05D1/04;B05C13/00
主分类号
A61K9/20
代理机构
代理人
主权项
地址
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