发明名称 OPTICAL CANTILEVER AND PRODUCTION METHOD THEREFOR
摘要 <p>An optical cantilever for SNOM which emits and/or detects light through a fine aperture, is excellent in mass-productivity and uniformity and permits a fast observation without damaging even a soft sample, characterized by comprising a base (1), a cantilever (2) extending from the base (1), an optical propagation unit (5) and an optical propagation tip (3) of a dielectric penetrating the cantilever (2) and formed so as to protrude beyond the side opposite to the base of the cantilever with its tip end sharpened, a light shielding film (6) covering around the tip-sharpened dielectric, and a fine aperture (4) formed at the tip end of the dielectric.</p>
申请公布号 WO2000028299(P1) 申请公布日期 2000.05.18
申请号 JP1999006121 申请日期 1999.11.02
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