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发明名称
MIKROMECHANISCHE TRANSMISSIONSMESSZELLE
摘要
申请公布号
DE59701451(D1)
申请公布日期
2000.05.18
申请号
DE19975001451
申请日期
1997.11.11
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
WOIAS, PETER;HILLERICH, BERND
分类号
G01N21/05;(IPC1-7):G01N21/05
主分类号
G01N21/05
代理机构
代理人
主权项
地址
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