| 摘要 |
A robotic wafer handler (50) is mounted on a central platform (24) of a cluster tool for transporting wafers between loading and processing stations (12, 14, 16, 18, 20, 22). The wafer handler (50) includes a main arm (52) that is rotatable around a vertical axis, translatable along the vertical axis, and translatable along an horizontal axis that rotates with the main arm (52) around the vertical axis. An auxiliary arm (76) is translatable along the horizontal axis relative to the main arm (52) between extended and retracted positions. In the extended position, an end effector (78) of the auxiliary am, (76) is aligned with an end effector (70) of the main arm (52) for retrieving or replacing wafers with the auxiliary arm (76). In the retracted position, the end effector (78) of the auxiliary arm (76) is withdrawn for retrieving or replacing wafers with the main arm (52).
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