RADIATION-SENSITIVE RESIN COMPOSITION

摘要

A radiation-sensitive resin composition containing an alkali-soluble resin, such as the positive quinonediazide-novolak type or the negative chemical amplification type, wherein the alkali-soluble resin is one obtained by condensation-polymerizing a compound represented by general formula (I) optionally together with a phenol with an aldehyde compound; wherein R represents hydroxy or C1-4 alkyl and n is an integer of 0 to 3, provided that when n is 2 or 3, then R's may be the same or different.