| 摘要 |
PROBLEM TO BE SOLVED: To simplify a structure, make superior temperature uniformity or a control temperature scope, reduce a size, and lower costs by a method wherein a lanthanum-calcium-manganese system oxide magnetic body is used as a resistor, and furthermore this resistor is combined with a lower voltage power source. SOLUTION: A heater 4 using a lanthanum-calcium-manganese system oxide magnetic body is combined with a lower voltage power source, and with a just simple structure that a current flows in the heater 4, an appropriate temperature control is made. There is prepared a temperature controlling element when a part is kept at -20 deg.C in a freezer which is kept cool at -50 deg.C. As an oxide magnetic body, in La1-xCaxMnOy (wherein 0.1<x<0.5 and 2.5<y<3.5), a thing of x=0.3 is used. This oxide magnetic body is coated on an insulator substrate 2 such as MgO, glass, or the like with a thickness about 0.02 mm by a green sheet method so as to be in a heater form. Thereafter, it is sintered at temperatures of about 800 to 900 deg.C.
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