| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase manufacturing yield and reduce manufacturing cost by providing a sealing process for heating and adhering many members constituting an envelope in a vacuum whose oxygen partial pressure is not more than a specific value and water partial pressure is not more than a specific value, after providing a current-carrying process and an activation process. SOLUTION: Before a sealing process of an envelope (vacuum container) constituted with a plurality of members, a current-carrying process for forming an electron emission portion by providing the current-carrying process for a conductive film for emitting electrons, and an activation process for changing the electron emission characteristic from the electron emission portion formed in the current-carrying process is provided. Thus, in the current-carrying process and the activation process, even if dispersions or failures of the electric characteristic of each electron emission element in an electron source occurs, they are restricted only to a loss of an electron source base. In addition, by providing the sealing process in a vacuum whose oxygen partial pressure is not more than 1×10-3 Pa and water partial pressure is not more than 2×10-3 Pa, occurrence of failure such as degradation of the electric characteristic of the electron emission element can be prevented.</p> |
