发明名称 LSI TESTER WITH LIGHT SOURCE
摘要 PROBLEM TO BE SOLVED: To enhance measuring performance by integrating a test head and a light source, and to easily reduce a size. SOLUTION: This tester is provided with a light source part 33 for irradiating a measuring device, a test head 3 and a performance board 4. The test head 3 is provided facing to the performance board 4, a through hole 32 is provided in a central part of the test head 3, and the light source 33 is provided in the through hole 32 of the test head 3.
申请公布号 JP2000137058(A) 申请公布日期 2000.05.16
申请号 JP19980310625 申请日期 1998.10.30
申请人 YOKOGAWA ELECTRIC CORP 发明人 GOI NORIYUKI
分类号 G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R31/28 主分类号 G01R31/26
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