| 摘要 |
PROBLEM TO BE SOLVED: To make production efficient by providing discontinuous ferromagnetic layers and transducer layers which are regularly arranged at recesses of a substrate that is formed so as to regularly arrange a plurality of recesses on one principal plane. SOLUTION: A resist film 2 is provided on the substrate 1 of a garnet structure such as a gadolinium-gallium-garnet single crystal substrate. Next, the resist film 2 at places where recesses are desired to be formed on the substrate 1 is eliminated by patterning the film 2 to a photolithographic method. Further, the surface area of the substrate 1 where the film 2 is not provided is etched with phosphoric acid, etc., to form recesses by using the film 2 as a mask. The film 2 is stripped, and a ferromagnetic film such as yttrium iron garnet is formed on the surface of the substrate 1 and the recesses 1a with a liquid crystal epitaxial method. A transducer electrode, etc., can easily be formed because the surface can be a flat planar magnetostatic wave device. |
