| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination device that can illuminate the whole illuminated area with substantially uniform intensity of illumination and high intensity. SOLUTION: An illumination light IL from an emitting end 103a of a light guide 103 is made incident onto a fly eye lends 105a via a relay lens 104a. The illumination light IL that has passed through an aperture 107a of an aperture diaphragm 107 of the incidental surface of the fly eye lens 105a illuminates an elongated rectangular illuminated area 111a in the Y direction on a mask 8 via a condenser lens 106a, visual field diaphragm 112, lens 108a and etc. By making the shape of the aperture 107a an ellipse that is narrow in the longitudinal direction of the illuminated area 111a, theσvalue of the illumination light IL incident onto the end in the longitudinal direction of the illuminated area 111a is prevented from becoming too large in the longitudinal direction.
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