| 摘要 |
PROBLEM TO BE SOLVED: To improve defect detection sensitivity without being influenced by a false defect, and to easily inspect a defect where the matching between patterns having a complex shape lacks in a short time. SOLUTION: A pattern is actually picked up from an inspection sample by a first light receiving element 14B to calculate the barycentric coordinates of the pattern picked up by the first light receiving element, and a pattern is actually picked up from the inspection sample by a second light receiving element 14A to calculate the barycentric coordinates of the pattern picked up by the second light receiving element. Subsequently, the barycentric coordinates of the pattern picked up by the first light receiving element is compared with those of the pattern picked up by the second light receiving element to detect a pattern defect. Therefore, the defect detection sensitivity can be improved without being influenced by a false defect, and the defect inspection by the distance between patterns having a complex shape can be easily carried out in a short time.
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