发明名称 Micromechanical acceleration or coriolis rotation-rate sensor
摘要 PCT No. PCT/DE96/00248 Sec. 371 Date Sep. 18, 1997 Sec. 102(e) Date Sep. 18, 1997 PCT Filed Feb. 17, 1996 PCT Pub. No. WO97/02467 PCT Pub. Date Jan. 23, 1997An acceleration sensor, particularly a Coriolis rotation-rate sensor, having a swinging structure that is movably suspended on a substrate (base) and can be deflected due to an acceleration effect, the sensor further having an arrangement for generating a planar swinging movement of the swinging structure, particularly a rotational swinging movement, and an evaluating arrangement for detecting a deflection of the swinging structure that is stipulated by acceleration, particularly for detecting a Coriolis acceleration. The swinging structure (12) is rotatably suspended so as to perform a planar swinging movement, and should perform a planar, rotational swinging movement.
申请公布号 US6062082(A) 申请公布日期 2000.05.16
申请号 US19970913598 申请日期 1997.09.18
申请人 ROBERT BOSCH GMBH 发明人 GUENTHER, GERO;FUNK, KARSTEN;LAERMER, FRANZ;SCHILP, ANDREA
分类号 G01C19/56;G01C19/5712;G01P9/04;G01P15/14;(IPC1-7):G01P15/08 主分类号 G01C19/56
代理机构 代理人
主权项
地址