| 摘要 |
PROBLEM TO BE SOLVED: To make the relative position of array elements extensively and inexpensively testable with high resolution. SOLUTION: Beams from respective fibers 1b are deflected in a prescribed direction by a lens array 2 consisting of plural lenses 2b of which optical axes are arranged nearly parallel to each other corresponding to plural fibers 1b arranged in an array shape, and in what extent the position of the fiber 1b is shifted from a design value is detected by the deviation from the design value in the direction. For detecting the deviation, a half mirror 3 is arranged behind the lens array 2, and the beams taken out by the lens array 2 are bisected to reflection beams and transmission beams with the half mirror 3 to be detected with first, second CCD cameras 4, 5. In such a manner, by detecting the positions of the beams in at least two places, the tilt of the beams is obtained.
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