| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing linear guide device capable of holding stable straightness accuracy by reducing generation of a bimetal phenomenon even when a large change of temperature is generated. SOLUTION: A device comprises a table 3 as a movable body which can move in a guide direction on a base stand 1, air bearing parts 6, 7, 8 guiding the table 3 supported by gas, and a suction force giving part 10 giving suction force relating to the air bearing parts 6, 7, 8. The base stand 1 consists of ceramics or stone, the suction force giving part 10 is provided with a suction rail part 10a, and a thermal expansion coefficient of the suction rail part 10a is almost equal to a thermal expansion coefficient of the base stand 1.
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