METHOD AND APPARATUS FOR MEASURING VIBRATION

摘要

PROBLEM TO BE SOLVED: To make accurately measurable the vibration of a measurement object irrespective of a shift amount of the object. SOLUTION: The method for measuring vibration includes a process of irradiating a measurement object with a laser light of a first wavelength (step S1), a process of generating beat waves of a laser light of a second wavelength different from the first wavelength and a feedback light reflected by the measurement object (step S2), and a process of outputting vibration information in which the beat waves generated in the beat wave generation process S2 are output as the vibration information of the measurement object.