| 摘要 |
PROBLEM TO BE SOLVED: To improve vibration eliminating capacity by detecting vibration of each composing member in a system from a vibration eliminating object to a setting position, and specially converting its detected signal so as to control an actuator, in a displacement generation type actuator active vibration insulating device as an active vibration eliminating device. SOLUTION: In a vibration eliminating unit used for an electronic microscope and the like, a piezoelectric element 1 is provided as an actuator, for example, a stepper 4 as a vibration eliminating object is carried through a laminated rubber 3 on an intermediate plate 5 supported by the piezoelectric element 1 and a plate spring 2. In the case of a vibration eliminating operation, absolute velocity of the intermediate plate 5 and absolute velocity of the stepper 4 are detected by a geophone sensor and the like, each detected signal is inputted to each PID compensator, output signals of respective PID compensators are added, and the piezoelectric element 1 is drivingly controlled on the basis of obtained adding signal. For detecting the absolute velocity, a servo accelerator sensor and the like is also utilized for detecting vibration as a sensor other than the geophone sensor. |
