| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric element driving mechanism that can obtain a large displacement by a few driving circuits. SOLUTION: In this driving mechanism, when an X driving voltage signal X+ is sent to a first external electrode 12 for x axis and a second internal electrode 9 for x axis from an X-axis driving circuit 16, the piezoelectric element of the electrode 12 extends in z-axis direction, the piezoelectric element of the electrode 9 shrinks, and a sample 20 being mounted to the free end of a scanner moves in the x-axis direction. Also, when an Y driving voltage signal Y+ is sent to a first external electrode 13 for y axis and a second internal electrode 10 for y axis from an Y-axis driving circuit 17, the piezoelectric element of the electrode 13 extends in z-axis direction, on the other hand, the piezoelectric element of the electrode 10 shrinks, and a sample 20 moves in the y-axis direction. With this kind of driving mechanism, a large displacement can be obtained by one driving circuit in the drive in x- or y-axis direction. |
