发明名称 HIGH-FREQUENCY DEVICE
摘要 PROBLEM TO BE SOLVED: To obtain a high-frequency device which is constituted to prevent the breakage of a high-frequency amplifier. SOLUTION: When comparison amplifiers 17 and 18 discriminate electric power as reflected power 0 through the adjustment of a matching variable capacitor 7 and a tuning variable capacitor 8, the amplifiers 17 and 18 send matching signals to a comparison amplifier 20. The amplifier 20 compares the value of the electric current flowing to a high-frequency amplifier 3 from a DC power source 11 with a reference value and controls motors 17 and 19 so that the value of the electric current flowing to the amplifier 3 may become equal to the reference value. Consequently, the variable capacitors 7 and 8 rotate until the value of the electric current flowing to the amplifier 3 becomes equal to the minimum value in a matching area.
申请公布号 JP2000138540(A) 申请公布日期 2000.05.16
申请号 JP19980313438 申请日期 1998.11.04
申请人 JEOL LTD 发明人 KATO TSUTOMU
分类号 H03F1/52;C23C14/40;(IPC1-7):H03F1/52 主分类号 H03F1/52
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