发明名称 FLOAT UP DEVICE
摘要 PROBLEM TO BE SOLVED: To float up a float up subject stably and position easily by providing a gas supply means for jetting the gas upward through a ventilative porous material having a plane on its upper part of and slanting the gas layer formed between the plane and the lower surface a float up subject and the plane of the ventilative porous material. SOLUTION: Four gas supply means (air supply pipe) 3 are arranged mutually parallelly on a pair of base materials 2 and the ventilative porous materials (ceramic materials) 5 are arranged by every three on each air supply pipe 3 so as to be arranged nearly equally on the lower surface of a glass base plate 4 as a float up subject. Each ventilative ceramics material 5 is communicated with the inside of the air supply pipe 3 and installed in the opening 7 provided on the air supply pipe 3 so that the air supplied to the air supply pipe 3 is passed. Twelve ventilative ceramic materials 5 are arranged dispersingly in the range of the horizontal shadow of the glass base plate 4. The axis T of the base material 2 is slanted by angleαfor the horizontal line H and the axis S of each air supply pipe 3 is slanted by angleβfor the horizontal line H and both angles are favorably 1-2 deg..
申请公布号 JP2000136024(A) 申请公布日期 2000.05.16
申请号 JP19980325948 申请日期 1998.10.30
申请人 DAIICHI SHISETSU KOGYO KK 发明人 MATSUMOTO TSUKASA
分类号 H01L21/677;B65G49/06;(IPC1-7):B65G49/06;H01L21/68 主分类号 H01L21/677
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