| 摘要 |
PROBLEM TO BE SOLVED: To measure the radial distribution of all current values, the radial position of a circling beam, and the condition of the vertical spread of a beam at one time by means of a compact probe. SOLUTION: A differential detection piece 26 consisting of three or more beam-unrestraining thin plates 26u, 26m, 26l aligned in the direction perpendicular to the direction of propagation of beams is provided behind an integral detection piece 12 in such a manner that the end of the differential detection piece 26 projects. Secondary electrons released from the beam colliding surface of the differential detection piece 26 are captured by use of capturing electrodes 30u, 30l placed to cover respectively the top and bottom of the differential detection piece 26.
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