| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device, capable of controlling the position and attitude of a stage in a non-air environment and of reducing the size and weight of the stage. SOLUTION: A stage WST is driven along a moving plane 36a with an electromagnetic force by first drive units (6211 to 62nn, 36) and is driven at least in the direction of a Z-axis which is perpendicular to the movement plane 36a or in the direction of leveling with a magnetic force by second drive units (60A TO 60D, 32). Accordingly, it is possible to drive a stage in the directions of 3 degrees of freedom in the movement plane with the electromagnetic force by the first drive units and in the directions of remaining 3 degrees of freedom with the magnetic force. This enables the position and attitude of the stage to be controlled without hindrances hitch, even in a non-air environment and also eliminates a leveling table and an air bearing to reduce the size and weight of the stage, and as a result, the controllability of the position of the stage is improved.</p> |
