METHOD AND SYSTEM FOR AUTOMATICALLY SORTING BREAKDOWN VOLTAGE WAVEFORM OF SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To shorten the time required for sorting the withstanding waveform of all field effect transistors on a semiconductor substrate by measuring the drain leak current of the field effect transistor with a plurality of set voltage and then sorting the withstanding waveform automatically, based on the measurements. SOLUTION: First, the drain leakage current of a field effect transistor is measured by means of a tester 1 with a plurality of set voltages, and measurements are stored in a memory 2 along with arrangement indexes and the set voltages. The data stored in the memory 2 are outputted as the source/ drain voltage vs drain leak current and are displayed on the screen of a terminal computer 4. Since the withstanding waveform pattern of the FET can be sorted automatically, the time required for sorting the withstanding waveform of FETs on a semiconductor substrate can be reduced significantly. Furthermore, the manufacturing process of semiconductor device can be reduced because the breakdown voltage waveform pattern of the FET can be sorted only through the decision from the use of the tester.